褚家如

褚家如 教授 博士生导师

办公电话:0551-36075043602544

传真:0551-3600550

邮箱: jrchu@ustc.edu.cn

实验室主页:http://mane.ustc.edu.cn/


个人概况:

中国科学技术大学毕业(85年学士\88年硕士\97年博士),1988年起留校任教。曾任日本东京大学工学部访问学者(9010-913月、949-12月);西班牙马德里自治大学访问学者(941-2月);日本学术振兴会研究员(JSPS Fellow,976-983月)和日本国立机械技术研究所NEDO产业技术研究员(984-009月)。

2000年回到中国科技大学担任教授/博士生导师。曾任奥门威尼斯APP常务副主任、奥门威尼斯APP分党委书记、副院长;现任微系统技术科学研究中心主任,兼任中国科学技术大学超精密工程研究所所长、校学位委员会委员,中国科学院南京天文光学技术研究所兼职研究员/博士生导师。学术服务包括担任中国微米纳米技术学会理事、中国仪器仪表学会理事、精密机械学会副秘书长、安徽省仪器仪表学会常务副理事长,担任《传感技术学报》、《光学精密工程》和《中国科学技术大学学报》等期刊编委,并曾应邀担任《J. Micromechanics and Micro-engineering》 guest editor主编IWMF特辑。入选国家教育部“优秀青年教师资助计划”,“安徽省高校优秀共产党员”,中国电子学会优秀论文奖,享受国务院政府特殊津贴。

研究方向: 

微机电系统技术

超精密测量

超精密天文仪器

学习经历: 

工作经历:

学术任职:

招生信息:

发表文章:

1、Corrosion mechanism and surface passivation strategues of polycrystalline silicon electrodes.Sensors and Actuators A: Physical, 2010. 

2、Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching.,Microelectronic Engineering, 2010. 87(12): p. 2475-2481

3、Research on the resolution of micro stereo lithography,Chinese Optics Letters, 2009. 7(8): p. 724-727.

4、Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane, Journal of Applied Physics, v106, 2009, 013505.

5、Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation, J. Micromech.Microeng.v19, 2009,035024.

6、Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror, Sensors and Actuators,A: Physical, v 147, n 1, Sep 15, 2008, p 242-247

7、Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS, Journal of Micromechanics and Microengineering, v 18, n 6, Jun 1, 2008, p 065001

8、Influences of environmental humidity on micro object handling efficiency, Journal of Micromechanics and Microengineering,v 17, n 2, Feb 1, 2007, p 187-192

9、Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446

10、Microdevice assembling by adhesive type probe in humid environment, Review of Scientific Instruments, 76,085104, 2005.

11、A novel wet etching process for PZT thin film for application in MEMS, Jpn. J. Appl. Phys., Vol. 43, No. 6B, 2004

12、Design and Simulation of Microheater Actuated by A PZT Microcantilever for High Density Data Storage; Sensors and Actuators A108(2003), pp7-11;

13、Microstructure and electrical properties of PZT thick film prepared by electrostatic spray deposition; Sensors and Actuators A108(2003),pp2-6;

14、Effect of bottom electrodes on microstructures and electric properties of sol-gel derived Pb(Zr0.53,Ti0.47)O3 thin films, Thin Solid Films, 416(2002),pp66-67

15、ESD method for Thick PZT film preparation, Jpn. J. Appl. Phys., Vol. 41(2002), Pt.1, No.6B,pp4317-4320

16、Novel multi-bridge structured piezoelectric micro-device for scanning force microscopy, J. Vac. Sci. Technol.B.18(6), pp. 3604-3607, Nov/Dec 2000



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