褚家如

时间:2018-10-31浏览:9410

褚家如 教授 博士生导师

联系地址:

合肥市金寨路96号 中国科学技术大学 奥门威尼斯APP
电话:0551-36075043602544

传真:0551-3600550

Email: jrchu@ustc.edu.cn
实验室主页:http://mane.ustc.edu.cn/

   中国科学技术大学毕业(85年学士\88年硕士\97年博士),1988年起留校任教。

   曾任日本东京大学工学部访问学者(9010-913月、949-12月);西班牙马德里自治大学访问学者(941-2月);日本学术振兴会研究员(JSPS Fellow,976-983月)和日本国立机械技术研究所NEDO产业技术研究员(984-009月)。

   1999年入选中国科学院“百人计划”,2000年回到中国科技大学担任教授/博士生导师。曾任奥门威尼斯APP常务副主任、奥门威尼斯APP分党委书记、副院长;现任微系统技术科学研究中心主任,兼任中国科学技术大学超精密工程研究所所长、校学位委员会委员,中国科学院南京天文光学技术研究所兼职研究员/博士生导师。学术服务包括担任中国微米纳米技术学会理事、中国仪器仪表学会理事、精密机械学会副秘书长、安徽省仪器仪表学会常务副理事长,担任《传感技术学报》、《光学精密工程》和《中国科学技术大学学报》等期刊编委,并曾应邀担任《J. Micromechanics and Micro-engineeringguest editor主编IWMF特辑。入选国家教育部“优秀青年教师资助计划”,“安徽省高校优秀共产党员”,中国电子学会优秀论文奖,享受国务院政府特殊津贴。 

主要科研方向:  

微机电系统技术

  超精密测量

  超精密天文仪器

代表性论文:

      Corrosion mechanism and surface passivation strategues of polycrystalline silicon electrodes.Sensors and Actuators A: Physical, 2010.   

  Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching.Microelectronic Engineering, 2010. 87(12): p. 2475-2481

Research on the resolution of micro stereo lithographyChinese Optics Letters, 2009. 7(8): p. 724-727.

Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane, Journal of Applied Physics, v106, 2009, 013505.

  Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation, J. Micromech.Microeng.v19, 2009,035024.

Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror, Sensors and Actuators,A: Physical, v 147, n 1, Sep 15, 2008, p 242-247

  Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS, Journal of Micromechanics and Microengineering, v 18, n 6, Jun 1, 2008, p 065001

  Influences of environmental humidity on micro object handling efficiency, Journal of Micromechanics and Microengineering,v 17, n 2, Feb 1, 2007, p 187-192

  Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446

  Microdevice assembling by adhesive type probe in humid environment, Review of Scientific Instruments, 76,085104, 2005.

  A novel wet etching process for PZT thin film for application in MEMS, Jpn. J. Appl. Phys., Vol. 43, No. 6B, 2004

  Design and Simulation of Microheater Actuated by A PZT Microcantilever for High Density Data Storage; Sensors and Actuators A108(2003), pp7-11;

  Microstructure and electrical properties of PZT thick film prepared by electrostatic spray deposition; Sensors and Actuators A108(2003)pp2-6;

  Effect of bottom electrodes on microstructures and electric properties of sol-gel derived Pb(Zr0.53,Ti0.47)O3 thin films, Thin Solid Films, 416(2002)pp66-67

  ESD method for Thick PZT film preparation, Jpn. J. Appl. Phys., Vol. 41(2002), Pt.1, No.6Bpp4317-4320

  Novel multi-bridge structured piezoelectric micro-device for scanning force microscopy, J. Vac. Sci. Technol.B.18(6), pp. 3604-3607, Nov/Dec 2000


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